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Effect of mass and incidence angle of keV energy polyatomic projectiles in silicon sputtering

✍ Scribed by M. Medvedeva; I. Wojciechowski; B.J. Garrison

Book ID: 117216616
Publisher: Elsevier Science
Year: 2002
Tongue: English
Weight: 243 KB
Volume: 505
Category: Article
ISSN: 0039-6028
DOI: 10.1016/s0039-6028(02)01387-0

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