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Self-modulating Sb incorporation in Si/SiGe superlattices during molecular beam epitaxial growth

✍ Scribed by K. Fujita; S. Fukatsu; N. Usami; Y. Shiraki; H. Yaguchi; R. Ito; K. Nakagawa


Publisher
Elsevier Science
Year
1993
Weight
73 KB
Volume
295
Category
Article
ISSN
0167-2584

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