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Self-limiting growth of ZnO films on (0 0 0 1) sapphire substrates by atomic layer deposition at low temperatures using diethyl-zinc and nitrous oxide

✍ Scribed by Yen-Ting Lin; Ping-Han Chung; Hung-Wei Lai; Hsin-Lun Su; Dong-Yuan Lyu; Kuo-Yi Yen; Tai-Yuan Lin; Chung-Yuan Kung; Jyh-Rong Gong

Book ID: 108064136
Publisher: Elsevier Science
Year: 2009
Tongue: English
Weight: 338 KB
Volume: 256
Category: Article
ISSN: 0169-4332
DOI: 10.1016/j.apsusc.2009.08.067

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Self-limiting growth of ZnO films on (0&#xa0;0&#xa0;0&#xa0;1) sapphire substrates by atomic layer deposition at low temperatures using diethyl-zinc and nitrous oxide

Self-limiting growth of ZnO films on (0 0 0 1) sapphire substrates by atomic layer deposition at low temperatures using diethyl-zinc and nitrous oxide