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Self-aligned indium–gallium–zinc oxide thin-film transistors with SiNx/SiO2/SiNx/SiO2 passivation layers

✍ Scribed by Chen, Rongsheng; Zhou, Wei; Zhang, Meng; Kwok, Hoi-Sing

Book ID: 124124128
Publisher: Elsevier Science
Year: 2014
Tongue: English
Weight: 619 KB
Volume: 564
Category: Article
ISSN: 0040-6090
DOI: 10.1016/j.tsf.2014.05.061

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