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Selectivity in copper chemical vapor deposition

✍ Scribed by Cohen, Susan L.; Liehr, Michael; Kasi, Srinandan

Book ID: 126265674
Publisher: American Institute of Physics
Year: 1992
Tongue: English
Weight: 579 KB
Volume: 60
Category: Article
ISSN: 0003-6951
DOI: 10.1063/1.107259

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