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Selective etching of AlGaAs/GaAs structures using the solutions of citric acid/H[sub 2]O[sub 2] and de-ionized H[sub 2]O/buffered oxide etch

✍ Scribed by J. Kim

Book ID: 126463802
Publisher: AVS (American Vacuum Society)
Year: 1998
Tongue: English
Weight: 473 KB
Volume: 16
Category: Article
ISSN: 0734-211X
DOI: 10.1116/1.589862

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