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Selective etching of Al/AlN structures for metallization of surface acoustic wave devices

✍ Scribed by Engelmark, F.; Iriarte, G. F.; Katardjiev, I. V.

Book ID: 121727672
Publisher: AVS (American Vacuum Society)
Year: 2002
Tongue: English
Weight: 484 KB
Volume: 20
Category: Article
ISSN: 0734-211X
DOI: 10.1116/1.1470511

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