✦ LIBER ✦

Surface acoustic wave devices on AlN/3C–SiC/Si multilayer structures

✍ Scribed by Lin, Chih-Ming; Chen, Yung-Yu; Felmetsger, Valery V; Lien, Wei-Cheng; Riekkinen, Tommi; Senesky, Debbie G; Pisano, Albert P

Book ID: 126734134
Publisher: Institute of Physics
Year: 2013
Tongue: English
Weight: 890 KB
Volume: 23
Category: Article
ISSN: 0960-1317
DOI: 10.1088/0960-1317/23/2/025019

No coin nor oath required. For personal study only.

📜 SIMILAR VOLUMES

Surface acoustic wave characteristics of

Surface acoustic wave characteristics of AlN thin films grown on a polycrystalline 3C-SiC buffer layer

✍ Si-Hong Hoang; Gwiy-Sang Chung 📂 Article 📅 2009 🏛 Elsevier Science 🌐 English ⚖ 399 KB

Surface acoustic wave devices based on A

Surface acoustic wave devices based on AlN/sapphire structure for high temperature applications

✍ Aubert, Thierry; Elmazria, Omar; Assouar, Badreddine; Bouvot, Laurent; Oudich, M 📂 Article 📅 2010 🏛 American Institute of Physics 🌐 English ⚖ 584 KB

Selective etching of Al/AlN structures f

Selective etching of Al/AlN structures for metallization of surface acoustic wave devices

✍ Engelmark, F.; Iriarte, G. F.; Katardjiev, I. V. 📂 Article 📅 2002 🏛 AVS (American Vacuum Society) 🌐 English ⚖ 484 KB

High-frequency surface acoustic wave dev

High-frequency surface acoustic wave devices based on LiNbO[sub 3]âdiamond multilayered structure

✍ Dogheche, E.; Remiens, D.; Shikata, S.; Hachigo, A.; Nakahata, H. 📂 Article 📅 2005 🏛 American Institute of Physics 🌐 English ⚖ 320 KB

Surface acoustic wave characteristics of

Surface acoustic wave characteristics of ZnO films grown on a polycrystalline 3C-SiC buffer layer

✍ Duy-Thach Phan; Ho-Cheol Suh; Gwiy-Sang Chung 📂 Article 📅 2011 🏛 Elsevier Science 🌐 English ⚖ 618 KB

Effects of rapid thermal annealing on su

Effects of rapid thermal annealing on surface acoustic wave ultraviolet sensors using ZnO nanorods grown on AlN/Si structures

✍ Duy-Thach Phan, Gwiy-Sang Chung 📂 Article 📅 2013 🏛 Springer US 🌐 English ⚖ 421 KB