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FEM modeling of AlN/diamond surface acoustic waves device

✍ Scribed by Le Brizoual, L.; Elmazria, O.

Book ID
122014779
Publisher
Elsevier Science
Year
2007
Tongue
English
Weight
264 KB
Volume
16
Category
Article
ISSN
0925-9635

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## Abstract This paper describes a general finite element method (FEM) for the AC steady state analysis of two‐dimensional piezoelectric devices. The method is applied to a diamond based surface acoustic wave (SAW) layered structure. We determined the penetration depth of the elastic waves correspo

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