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Selective deposition of diamond films on silicon wafer with SiO2 masks by tungsten filament chemical vapor deposition

โœ Scribed by Yu San; Jin Zengsun; Lu Xianyi; Zou Guangtian


Book ID
119124628
Publisher
Elsevier Science
Year
1991
Tongue
English
Weight
417 KB
Volume
10
Category
Article
ISSN
0167-577X

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