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Selective area platinum silicide film deposition using a molecular precursor chemical beam source

✍ Scribed by David S.Y. Hsu; Louis M. Troilo; Noel H. Turner; Kim W. Pierson

Publisher: Elsevier Science
Year: 1995
Tongue: English
Weight: 808 KB
Volume: 269
Category: Article
ISSN: 0040-6090
DOI: 10.1016/0040-6090(95)06866-x

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