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Ultra-high vacuum metalorganic chemical vapor deposition of GaAs thin films onto Si(100) using a single-source precursor

✍ Scribed by Jiong-Ping Lu; Rishi Raj; Alex Wernberg

Publisher: Elsevier Science
Year: 1991
Tongue: English
Weight: 543 KB
Volume: 205
Category: Article
ISSN: 0040-6090
DOI: 10.1016/0040-6090(91)90307-j

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