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Secondary ion mass spectrometry depth profiling of proton-exchanged LiNbO3 waveguides

✍ Scribed by Wilson, R. G.; Novak, S. W.; Zavada, J. M.; Loni, A.; De La Rue, R. M.


Book ID
120205072
Publisher
American Institute of Physics
Year
1989
Tongue
English
Weight
704 KB
Volume
66
Category
Article
ISSN
0021-8979

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## Abstract Depth profiles obtained using secondary ion mass spectrometry with O~2~^+^ primary ions and without sample rotation have been measured for Mg‐implanted GaAs, B‐ and ^2^H‐implanted bulk Mo, a deposited Ni/SiO~2~ interface and for a molecular‐beam‐epitaxy‐grown structure consisting of mon