✦ LIBER ✦

Secondary defects in low-energy As- and BF2-implanted Si

✍ Scribed by Masao Tamura; Yuichi Hiroyama; Akio Nishida

No coin nor oath required. For personal study only.

📜 SIMILAR VOLUMES

Characterization and removal of residual

✍ J.J. Yang; L.J. Chen 📂 Article 📅 1997 🏛 Elsevier Science 🌐 English ⚖ 402 KB

Annealing behavior of low energy, high d

✍ C.H. Chu; L.J. Chen 📂 Article 📅 1991 🏛 Elsevier Science 🌐 English ⚖ 515 KB

Damage and defects from low-energy impla

✍ D.J. Eaglesham; A. Agarwal; T.E. Haynes; H.-J. Gossmann; D.C. Jacobson; J.M. Poa 📂 Article 📅 1996 🏛 Elsevier Science 🌐 English ⚖ 401 KB

Transient enhanced diffusion and defect

✍ Krishnamoorthy, V.; Moller, K.; Jones, K. S.; Venables, D.; Jackson, J.; Rubin, 📂 Article 📅 1998 🏛 American Institute of Physics 🌐 English ⚖ 565 KB

Depth profiles of secondary defects of A

✍ Katsuya Ishikawa; Masakatsu Yoshida; Mono Inoue 📂 Article 📅 1989 🏛 Elsevier Science 🌐 English ⚖ 317 KB

Electrical profiles of ultrashallow p+ l

✍ Tamaki, Y.; Ozaki, D.; Inada, T. 📂 Article 📅 2005 🏛 American Institute of Physics 🌐 English ⚖ 407 KB