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Scanning tunneling microscopy investigation of the microtopography of SiO2and Si surfaces at the Si/SiO2interface in SIMOX structures

✍ Scribed by D. V. Vyalykh; S. I. Fedoseenko


Book ID
110120104
Publisher
Springer
Year
1999
Tongue
English
Weight
452 KB
Volume
33
Category
Article
ISSN
1063-7826

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