Evolution of step-terrace structure at Si–SiO2 interface in SIMOX substrate during annealing

✍ Scribed by T. Ishiyama; M. Nagase; Y. Omura

• Book ID: 108417615
• Publisher: Elsevier Science
• Year: 2002
• Tongue: English
• Weight: 129 KB
• Volume: 190
• Category: Article
• ISSN: 0169-4332
• DOI: 10.1016/s0169-4332(01)00834-0