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Scaling of MOS technology to submicrometer feature sizes

✍ Scribed by Mead, Carver A.

No coin nor oath required. For personal study only.

📜 SIMILAR VOLUMES

Scaling of MOS technology to submicromet

✍ Carver A. Mead 📂 Article 📅 1994 🏛 Springer 🌐 English ⚖ 917 KB

Electrical measurement of feature sizes

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Electrical Measurement of Feature Sizes

✍ Takacs, D.; Muller, W.; Schwabe, U. 📂 Article 📅 1980 🏛 IEEE 🌐 English ⚖ 964 KB

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✍ Schwiegerling, Jim 📂 Article 📅 2002 🏛 Optical Society of America 🌐 English ⚖ 270 KB

Feature size limit of liftoff metallizat

✍ Homma, Y.; Yajima, A.; Harada, S. 📂 Article 📅 1982 🏛 IEEE 🌐 English ⚖ 895 KB