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SAXS analysis of the effect of H2 dilution on microstructural changes of HWCVD deposited a-SiC : H

✍ Scribed by Bibhu P. Swain


Book ID
113789741
Publisher
Elsevier Science
Year
2006
Tongue
English
Weight
439 KB
Volume
60
Category
Article
ISSN
0167-577X

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