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Rutherford backscattering studies of solid phase recrystallization and incorporation in erbium-implanted silicon

✍ Scribed by Dai-qing Li; Ting-qi Ren; Bao-an Gong; Bei Zhang; Kong-jun Chen; Pei-ran Zhu; Tian-bing Xu


Book ID
103954441
Publisher
Elsevier Science
Year
1995
Tongue
English
Weight
355 KB
Volume
30
Category
Article
ISSN
0921-5107

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