✦ LIBER ✦
Rutherford backscattering study of crystal orientation dependent annealing effects in high-dose antimony implanted silicon
✍ Scribed by W. J. M. J. Josquin; Y. Tamminga
- Publisher
- Springer
- Year
- 1978
- Tongue
- English
- Weight
- 498 KB
- Volume
- 15
- Category
- Article
- ISSN
- 1432-0630
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