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A Rutherford backscattering study of Ar- and Xe-implanted silicon carbide

✍ Scribed by A. Föhl; R.M. Emrick; H.D. Carstanjen


Book ID
113282558
Publisher
Elsevier Science
Year
1992
Tongue
English
Weight
630 KB
Volume
65
Category
Article
ISSN
0168-583X

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