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Rutherford backscattering investigation of thermally oxidized tantalum on silicon

โœ Scribed by J. Hirvonen; A.G. Revesz; T.D. Kirkendall


Publisher
Elsevier Science
Year
1976
Tongue
English
Weight
450 KB
Volume
33
Category
Article
ISSN
0040-6090

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๐Ÿ“œ SIMILAR VOLUMES


Oxidation of tantalum film on silicon
โœ A.G. Revesz; J. Allison; T. Kirkendall; J. Reynolds ๐Ÿ“‚ Article ๐Ÿ“… 1974 ๐Ÿ› Elsevier Science ๐ŸŒ English โš– 218 KB