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Effects of oxidation conditions on the properties of tantalum oxide films on silicon substrates

โœ Scribed by Sung Wook Park; Ho Bin Im


Publisher
Elsevier Science
Year
1992
Tongue
English
Weight
534 KB
Volume
207
Category
Article
ISSN
0040-6090

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๐Ÿ“œ SIMILAR VOLUMES


Oxidation of tantalum film on silicon
โœ A.G. Revesz; J. Allison; T. Kirkendall; J. Reynolds ๐Ÿ“‚ Article ๐Ÿ“… 1974 ๐Ÿ› Elsevier Science ๐ŸŒ English โš– 218 KB