Electrochemistry of Silicon || Anodic Ox
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Lehmann, Volker
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Article
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2002
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Wiley-VCH Verlag GmbH
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## Silicon Oxidation Techniques One of the properties that makes silicon the elephant in the zoo of semiconducting materials used in microelectronic manufacturing is the superior dielectric properties of its oxide [So1]. An SiO 2 layer can be formed by a simple thermal oxidation process in a wet (