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Routine mass-thickness and nonuniformity determinations of thin films

โœ Scribed by K.F. Wylie; G.R. Hagee


Publisher
Elsevier Science
Year
1965
Weight
459 KB
Volume
32
Category
Article
ISSN
0029-554X

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Thickness determination of thin films ba
โœ Kaltsas, G.; Glezos, N.; Valamontes, E.; Nassiopoulou, A. G. ๐Ÿ“‚ Article ๐Ÿ“… 1998 ๐Ÿ› John Wiley and Sons ๐ŸŒ English โš– 157 KB

A non-destructive method for evaluation of the thickness of รlms over bulk substrates is presented. This method is based on evaluation of the parameters of the decay part of the x-ray signal ratio. For a selected energy range of each รlm thickness it is demonstrated that the decay part follows an ex