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Round robin study of impurity analysis in gallium arsenide using secondary ion mass spectrometry

✍ Scribed by Homma, Yoshikazu.; Kurosawa, Satoru.; Yoshioka, Yoshiaki.; Shibata, Masahiro.; Nomura, Koichi.; Nakamura, Yasushi.

Book ID: 126875974
Publisher: American Chemical Society
Year: 1985
Tongue: English
Weight: 740 KB
Volume: 57
Category: Article
ISSN: 0003-2700
DOI: 10.1021/ac00291a041

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