Prediction of secondary ion currents for trace elements in gallium arsenide in secondary ion mass spectrometry
โ Scribed by Morgan, A.E.; Clegg, J.B.
- Book ID
- 122502449
- Publisher
- Elsevier Science
- Year
- 1980
- Tongue
- English
- Weight
- 365 KB
- Volume
- 35
- Category
- Article
- ISSN
- 0584-8547
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๐ SIMILAR VOLUMES
Round-robin studies on relative sensitivity factors (RSFs) in secondary ion mass spectrometry (SIMS) were conducted using bulk GaAs samples uniformly doped with various impurity elements. A total of 31 laboratories participated in two round-robins. More than 30 sets of relative ion intensities were
Trace elements in \(5-\mu\) l sample solutions deposited on a substrate were determined by secondary ion mass spectrometry employing the internal standard method. A simple sample mount made of copper was devised to restrict the sample residue within a small area. The absolute detection limits of 22