High spatial resolution 3D analysis of materials using gallium focused ion beam secondary ion mass spectrometry (FIB SIMS)

✍ Scribed by Bunbunoshin Tomiyasu; Isamu Fukuju; Hirotaka Komatsubara; Masanori Owari; Yoshimasa Nihei

• Book ID: 114169720
• Publisher: Elsevier Science
• Year: 1998
• Tongue: English
• Weight: 451 KB
• Volume: 136-138
• Category: Article
• ISSN: 0168-583X
• DOI: 10.1016/s0168-583x(97)00790-8