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Improvement of sensitivity using principal component analysis by dual focused ion beam time-of-flight secondary ion mass spectrometry

✍ Scribed by Yoshihiro Morita; Masanori Owari


Book ID
108060604
Publisher
Elsevier Science
Year
2008
Tongue
English
Weight
261 KB
Volume
255
Category
Article
ISSN
0169-4332

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A new focused ion beam optical system that uses a liquid metal ion source was designed for a new secondary ion time-of-flight mass spectrometry instrument. This optical system consists mainly of two electrostatic lenses. The axial performance of the system was calculated to decide the design values