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Roughness evolution of Si surfaces upon Ar ion erosion

✍ Scribed by V.I.T.A. de Rooij-Lohmann; I.V. Kozhevnikov; L. Peverini; E. Ziegler; R. Cuerno; F. Bijkerk; A.E. Yakshin

Publisher: Elsevier Science
Year: 2010
Tongue: English
Weight: 391 KB
Volume: 256
Category: Article
ISSN: 0169-4332
DOI: 10.1016/j.apsusc.2010.03.045

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