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Evaluation of surface roughness of ULE® substrates machined by Ar+ ion beam

✍ Scribed by Yuichi Kurashima; Shuhei Miyachi; Iwao Miyamoto; Manabu Ando; Atsushi Numata


Publisher
Elsevier Science
Year
2008
Tongue
English
Weight
206 KB
Volume
85
Category
Article
ISSN
0167-9317

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