Evaluation of surface roughness of ULE® substrates machined by Ar+ ion beam
✍ Scribed by Yuichi Kurashima; Shuhei Miyachi; Iwao Miyamoto; Manabu Ando; Atsushi Numata
- Publisher
- Elsevier Science
- Year
- 2008
- Tongue
- English
- Weight
- 206 KB
- Volume
- 85
- Category
- Article
- ISSN
- 0167-9317
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