✦ LIBER ✦
Roughness and damage of a GaAs surface after chemically assisted ion beam etching with Cl2/Ar+
✍ Scribed by J. Dienelt; K. Zimmer; J. von Sonntag; B. Rauschenbach; C. Bundesmann
- Publisher
- Elsevier Science
- Year
- 2005
- Tongue
- English
- Weight
- 303 KB
- Volume
- 78-79
- Category
- Article
- ISSN
- 0167-9317
No coin nor oath required. For personal study only.