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Low energy ion beam machining of ULE® substrates: Evaluation of surface roughness

✍ Scribed by Takuro Inaba; Yuichi Kurashima; Shahjada A. Pahlovy; Iwao Miyamoto; Manabu Ando; Atsushi Numata

Publisher
Elsevier Science
Year
2009
Tongue
English
Weight
314 KB
Volume
86
Category
Article
ISSN
0167-9317

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