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Rotation of Particles Trapped in the Sheath of a Radio-Frequency Capacitively Coupled Plasma

✍ Scribed by Paeva, G.V.; Dahiya, R.P.; Kroesen, G.M.W.; Stoffels, W.W.

Book ID: 118202131
Publisher: IEEE
Year: 2004
Tongue: English
Weight: 237 KB
Volume: 32
Category: Article
ISSN: 0093-3813
DOI: 10.1109/tps.2004.826141

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