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Plasma inhomogeneities near the electrodes of a capacitively-coupled radio-frequency discharge containing dust particles

✍ Scribed by Tawidian, H.; Mikikian, M.; Couëdel, L.; Lecas, T.


Book ID
120303812
Publisher
EDP Sciences
Year
2011
Tongue
English
Weight
485 KB
Volume
56
Category
Article
ISSN
1286-0042

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