We demonstrated a new imprint method named nanoimprinting in metal/polymer bi-layer structures (NIMB) for patterning metal films with varied profiles. Converse with conventional nanoimprint lithography, the patterned mold is directly imprint in metal films not in polymer based resists. In general, d
✦ LIBER ✦
Room-temperature and low-pressure nanoimprint lithography
✍ Scribed by A. Lebib; Y. Chen; E. Cambril; P. Youinou; V. Studer; M. Natali; A. Pépin; H.M. Janssen; R.P. Sijbesma
- Book ID
- 114155419
- Publisher
- Elsevier Science
- Year
- 2002
- Tongue
- English
- Weight
- 934 KB
- Volume
- 61-62
- Category
- Article
- ISSN
- 0167-9317
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