✦ LIBER ✦
Room temperature nanoimprint lithography using a bilayer of HSQ/PMMA resist stack
✍ Scribed by Jiarui Tao; Yifang Chen; Xingzhong Zhao; Adnan Malik; Zheng Cui
- Publisher
- Elsevier Science
- Year
- 2005
- Tongue
- English
- Weight
- 201 KB
- Volume
- 78-79
- Category
- Article
- ISSN
- 0167-9317
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