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Role of Annealing Conditions on Surface Passivation Properties of ALD Al2O3 Films

✍ Scribed by Kersten, Friederike; Schmid, Alexander; Bordihn, Stefan; Müller, Jörg W.; Heitmann, Johannes

Book ID: 122712576
Publisher: Elsevier
Year: 2013
Weight: 354 KB
Volume: 38
Category: Article
ISSN: 1876-6102
DOI: 10.1016/j.egypro.2013.07.354

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