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Activation of Al2O3passivation layers on silicon by microwave annealing

✍ Scribed by Ziegler, Johannes; Otto, Martin; Sprafke, Alexander N.; Wehrspohn, Ralf B.


Book ID
121619343
Publisher
Springer
Year
2013
Tongue
English
Weight
664 KB
Volume
113
Category
Article
ISSN
1432-0630

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