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Surface preparation and post thermal treatment effects on interface properties of thin Al2O3 films deposited by ALD

✍ Scribed by Y. Chang; F. Ducroquet; E. Gautier; O. Renault; J. Legrand; J.F. Damlencourt; F. Martin

Book ID: 108207326
Publisher: Elsevier Science
Year: 2004
Tongue: English
Weight: 412 KB
Volume: 72
Category: Article
ISSN: 0167-9317
DOI: 10.1016/j.mee.2004.01.012

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