Excellent silicon surface passivation with 5 Å thin ALD Al2O3 layers: Influence of different thermal post-deposition treatments

✍ Scribed by Armin Richter; Jan Benick; Martin Hermle; Stefan W. Glunz

• Book ID: 112183201
• Publisher: John Wiley and Sons
• Year: 2011
• Tongue: English
• Weight: 294 KB
• Volume: 5
• Category: Article
• ISSN: 1862-6254
• DOI: 10.1002/pssr.201105188