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Role of adsorption layer in chemical vapor deposition

✍ Scribed by E.I. Givargizov

Publisher: Elsevier Science
Year: 1981
Tongue: English
Weight: 332 KB
Volume: 52
Category: Article
ISSN: 0022-0248
DOI: 10.1016/0022-0248(81)90193-7

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