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RHEED investigation of Ge surface segregation during gas source MBE of Si/Si1-xGex heterostructure

✍ Scribed by N. Ohtani; S.M. Mokler; M.H. Xie; J. Zhang; B.A. Joyce


Publisher
Elsevier Science
Year
1993
Weight
82 KB
Volume
284
Category
Article
ISSN
0167-2584

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