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Rf-sputtered epitaxial films of Bi12TiO20 on Bi12GeO20 for optical waveguiding

โœ Scribed by T. Mitsuyu; K. Wasa; S. Hayakawa


Publisher
Elsevier Science
Year
1977
Tongue
English
Weight
645 KB
Volume
41
Category
Article
ISSN
0022-0248

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TiO 2 thin films were deposited on unheated and heated glass substrates at an elevated sputtering pressure of 3 Pa by radio frequency (RF) reactive magnetron sputtering. TiO 2 films deposited at room temperature were annealed in air for 1 h at various temperatures ranging from 300 to 600 ยฐC. The str