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Effect of environment and heat treatment on the optical properties of RF-sputtered SnO2 thin films

✍ Scribed by S. Saipriya; M. Sultan; R. Singh

Publisher
Elsevier Science
Year
2011
Tongue
English
Weight
957 KB
Volume
406
Category
Article
ISSN
0921-4526

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TiO 2 thin films were deposited on unheated and heated glass substrates at an elevated sputtering pressure of 3 Pa by radio frequency (RF) reactive magnetron sputtering. TiO 2 films deposited at room temperature were annealed in air for 1 h at various temperatures ranging from 300 to 600 Β°C. The str