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RF Self-Bias Characteristics in Inductively Coupled Plasma

โœ Scribed by Fukasawa, Takayuki; Nouda, Tatuki; Nakamura, Akihiro; Shindo, Haruo; Horiike, Yasuhiro


Book ID
118059099
Publisher
Institute of Pure and Applied Physics
Year
1993
Tongue
English
Weight
683 KB
Volume
32
Category
Article
ISSN
0021-4922

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