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Plasma boundary sheath in the afterglow of a pulsed inductively coupled RF plasma

✍ Scribed by Osiac, M; Schwarz-Selinger, T; O'Connell, D; Heil, B; Petrovic, Z Lj; Turner, M M; Gans, T; Czarnetzki, U

Book ID: 120506526
Publisher: Institute of Physics
Year: 2007
Tongue: English
Weight: 377 KB
Volume: 16
Category: Article
ISSN: 0963-0252
DOI: 10.1088/0963-0252/16/2/019

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