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Characterization of stationary and pulsed inductively coupled RF discharges for plasma sterilization

✍ Scribed by Gans, T; Osiac, M; O'Connell, D; Kadetov, V A; Czarnetzki, U; Schwarz-Selinger, T; Halfmann, H; Awakowicz, P

Book ID: 121444612
Publisher: Institute of Physics
Year: 2005
Tongue: English
Weight: 486 KB
Volume: 47
Category: Article
ISSN: 0741-3335
DOI: 10.1088/0741-3335/47/5A/026

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