✦ LIBER ✦
Time Resolved Spectroscopic Characterization of a-C:H Deposition by Methane and Removal by Oxygen Inductively Coupled RF Plasma
✍ Scribed by M. Bišćan; Z. Kregar; N. Krstulović; S. Milošević
- Publisher
- Springer
- Year
- 2010
- Tongue
- English
- Weight
- 658 KB
- Volume
- 30
- Category
- Article
- ISSN
- 0272-4324
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