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Modeling and measurement of monomer pressure evolution in an inductively coupled pulsed plasma reactor for thin polymer films

✍ Scribed by Shepsis, L.V.; Pedrow, P.D.; Mahalingam, R.; Osman, M.A.

Book ID: 114559128
Publisher: IEEE
Year: 2000
Tongue: English
Weight: 165 KB
Volume: 28
Category: Article
ISSN: 0093-3813
DOI: 10.1109/27.902244

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